Accession Number : AD0163576

Title :   Optical System for Intermixing Dissimilar Step-and-Repeat Patterns.

Descriptive Note : Patent,

Corporate Author : OFFICE OF THE SECRETARY OF THE ARMY WASHINGTON D C

Personal Author(s) : Reams,Robert B. , Jr. ; Klute,Charles H.

Report Date : 16 NOV 1971

Pagination or Media Count : 6

Abstract : The invention relates generally to photographic apparatus and more particularly to step-and-repeat photographic apparatus for fabricating photomasks necessary in the manufacture of solid-state integrated electronic microcircuits. The report describes a step-and-repeat camera system for automatically intermixing dissimilar unit patterns on a photomask for use in the fabrication of solid-state electronic microcircuits. (Modified author abstract)

Descriptors :   (*INTEGRATED CIRCUITS, *MASKING), (*MICROELECTRONICS, MANUFACTURING), (*PHOTOGRAPHIC EQUIPMENT, *PATENTS), OPTICAL EQUIPMENT, CAMERAS

Subject Categories : Electrical and Electronic Equipment
      Mfg & Industrial Eng & Control of Product Sys
      Photography

Distribution Statement : APPROVED FOR PUBLIC RELEASE