Accession Number : AD0164048
Title : Thin Vapor-Deposited Metal Film Voltage Regulator.
Descriptive Note : Patent,
Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON D C
Personal Author(s) : Hitchcock,Robert D.
Report Date : 10 MAR 1970
Pagination or Media Count : 5
Abstract : The patent describes a thin film voltage regulator and its method of manufacture comprising a sandwich of aluminum, aluminum oxide, manganese and lead. The thickness of the regulator is of the order of 0.00001 cm. The manufacture comprises vaporizing and depositing the aluminum, manganese and lead at a pressure of only 0.001 torr with an oxidation step after the depositing of aluminum. A double mask arrangement facilitates ease of manufacture.
Descriptors : (*VOLTAGE REGULATORS, *PATENTS), METAL FILMS, DIELECTRIC FILMS, ALUMINUM, ALUMINA, MANGANESE, LEAD(METAL), VAPOR PLATING, VACUUM APPARATUS, INTEGRATED CIRCUITS
Subject Categories : Electrical and Electronic Equipment
Distribution Statement : APPROVED FOR PUBLIC RELEASE