Accession Number : AD0164183

Title :   Method of Making Ion Implanted Dielectric Enclosures.

Descriptive Note : Patent,

Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON D C

Personal Author(s) : Davey,John Edmund

Report Date : 16 MAY 1972

Pagination or Media Count : 4

Abstract : The patent describes a method of producing electrical isolation between semiconductor devices diffused in a substrate by ion implantation of various species of gases around the semiconductor devices, forming insulating dielectric cups.

Descriptors :   (*Semiconductor devices, Dielectrics), (*Patents, Dielectrics), (*Ion implantation, Dielectrics), Interfaces, Integrated circuits, Encapsulation

Subject Categories : Electrical and Electronic Equipment

Distribution Statement : APPROVED FOR PUBLIC RELEASE