Accession Number : AD0164360
Title : Apparatus for Ultra-High Vacuum in situ Thin Film Studies.
Descriptive Note : Patent,
Corporate Author : DEPARTMENT OF THE AIR FORCE WASHINGTON D C
Personal Author(s) : Ruf,Franz X. ; Chase,Wayne R. ; Press,Raymond A.
Report Date : 28 NOV 1972
Pagination or Media Count : 10
Abstract : The patent relates to a thin film fabricating and test apparatus with a substrate holder cart positioned on a pair of tracks within a tubular vacuum system. Feed through drive units operate to move the cart to positions adjacent deposition units and test units within the vacuum system. A second drive unit positions the cart and moves masks and test contacts to a position adjacent substrate. A third drive unit positions deposition control shutters adjacent the substrate.
Descriptors : *Thin films, *Vacuum apparatus, *Patents, Deposition, Substrates, Vacuum pumps, Manufacturing, Test equipment
Subject Categories : Machinery and Tools
Test Facilities, Equipment and Methods
Distribution Statement : APPROVED FOR PUBLIC RELEASE