Accession Number : AD0164360

Title :   Apparatus for Ultra-High Vacuum in situ Thin Film Studies.

Descriptive Note : Patent,

Corporate Author : DEPARTMENT OF THE AIR FORCE WASHINGTON D C

Personal Author(s) : Ruf,Franz X. ; Chase,Wayne R. ; Press,Raymond A.

Report Date : 28 NOV 1972

Pagination or Media Count : 10

Abstract : The patent relates to a thin film fabricating and test apparatus with a substrate holder cart positioned on a pair of tracks within a tubular vacuum system. Feed through drive units operate to move the cart to positions adjacent deposition units and test units within the vacuum system. A second drive unit positions the cart and moves masks and test contacts to a position adjacent substrate. A third drive unit positions deposition control shutters adjacent the substrate.

Descriptors :   *Thin films, *Vacuum apparatus, *Patents, Deposition, Substrates, Vacuum pumps, Manufacturing, Test equipment

Subject Categories : Machinery and Tools
      Test Facilities, Equipment and Methods

Distribution Statement : APPROVED FOR PUBLIC RELEASE