Accession Number : AD0164449
Title : Cross-Mounted Mask Changer with Thickness Monitoring.
Descriptive Note : Patent,
Corporate Author : DEPARTMENT OF THE AIR FORCE WASHINGTON D C
Personal Author(s) : Harel,Abraham
Report Date : 24 JUL 1973
Pagination or Media Count : 8
Abstract : The patent relates to a mask changer mounted in vacuum in a glass cross and, more particularly, to an automatically cycled and monitored device for vapor deposit of metal vapor or other evaporable material on a substrate surface that is partially and sequentially masked to establish a desired conductivity pattern.
Descriptors : *Masking, *Patents, Industrial equipment, Vapor deposition, Monitors, Positioning devices(Machinery)
Subject Categories : Machinery and Tools
Distribution Statement : APPROVED FOR PUBLIC RELEASE