Accession Number : AD0164449

Title :   Cross-Mounted Mask Changer with Thickness Monitoring.

Descriptive Note : Patent,

Corporate Author : DEPARTMENT OF THE AIR FORCE WASHINGTON D C

Personal Author(s) : Harel,Abraham

Report Date : 24 JUL 1973

Pagination or Media Count : 8

Abstract : The patent relates to a mask changer mounted in vacuum in a glass cross and, more particularly, to an automatically cycled and monitored device for vapor deposit of metal vapor or other evaporable material on a substrate surface that is partially and sequentially masked to establish a desired conductivity pattern.

Descriptors :   *Masking, *Patents, Industrial equipment, Vapor deposition, Monitors, Positioning devices(Machinery)

Subject Categories : Machinery and Tools

Distribution Statement : APPROVED FOR PUBLIC RELEASE