Accession Number : AD0164650

Title :   Method for the Investigation of Thin Films on a Semiconductor Substrate in a Scanning Electron Microscope.

Descriptive Note : Patent,

Corporate Author : DEPARTMENT OF THE AIR FORCE WASHINGTON D C

Personal Author(s) : Varker,Charles J.

Report Date : 13 NOV 1973

Pagination or Media Count : 4

Abstract : The patent describes a method of investigating thin films where the film is mounted on semiconductor substrate containing a p-n junction and the film is scanned with an electron beam. The resulting current produced at the p-n junction by the penetrating electrons modulates the brightness of an associated display tube.

Descriptors :   *Thin films, *Semiconducting films, *Test methods, *Patents, Electron microscopy, Secondary emission

Subject Categories : Solid State Physics

Distribution Statement : APPROVED FOR PUBLIC RELEASE