Accession Number : AD0164650
Title : Method for the Investigation of Thin Films on a Semiconductor Substrate in a Scanning Electron Microscope.
Descriptive Note : Patent,
Corporate Author : DEPARTMENT OF THE AIR FORCE WASHINGTON D C
Personal Author(s) : Varker,Charles J.
Report Date : 13 NOV 1973
Pagination or Media Count : 4
Abstract : The patent describes a method of investigating thin films where the film is mounted on semiconductor substrate containing a p-n junction and the film is scanned with an electron beam. The resulting current produced at the p-n junction by the penetrating electrons modulates the brightness of an associated display tube.
Descriptors : *Thin films, *Semiconducting films, *Test methods, *Patents, Electron microscopy, Secondary emission
Subject Categories : Solid State Physics
Distribution Statement : APPROVED FOR PUBLIC RELEASE