Accession Number : AD0164666

Title :   Instrument for Automatically Inspecting Integrated Circuit Masks for Pinholes and Spots.

Descriptive Note : Patent,

Corporate Author : DEPARTMENT OF THE AIR FORCE WASHINGTON D C

Personal Author(s) : Bourdelais,Roger J. ; Colangelo,Dominick ; McFadyen,Robert J. ; Elliott,James F.

Report Date : 05 MAR 1974

Pagination or Media Count : 5

Abstract : The patent describes an apparatus for automatically detecting pinholes and spots in an integrated circuit photographic mask. The photographic mask is scanned by a television-type camera through a microscope to detect imperfections. Signals representing the imperfection are processed in logic circuitry.

Descriptors :   *Test equipment, *Patents, Automatic, Photomasking, Masks, Integrated circuits, Defects(Materials), Television cameras, Vidicons, Microscopes, Signal processing

Subject Categories : Electrooptical and Optoelectronic Devices
      Test Facilities, Equipment and Methods

Distribution Statement : APPROVED FOR PUBLIC RELEASE