Accession Number : AD0164666
Title : Instrument for Automatically Inspecting Integrated Circuit Masks for Pinholes and Spots.
Descriptive Note : Patent,
Corporate Author : DEPARTMENT OF THE AIR FORCE WASHINGTON D C
Personal Author(s) : Bourdelais,Roger J. ; Colangelo,Dominick ; McFadyen,Robert J. ; Elliott,James F.
Report Date : 05 MAR 1974
Pagination or Media Count : 5
Abstract : The patent describes an apparatus for automatically detecting pinholes and spots in an integrated circuit photographic mask. The photographic mask is scanned by a television-type camera through a microscope to detect imperfections. Signals representing the imperfection are processed in logic circuitry.
Descriptors : *Test equipment, *Patents, Automatic, Photomasking, Masks, Integrated circuits, Defects(Materials), Television cameras, Vidicons, Microscopes, Signal processing
Subject Categories : Electrooptical and Optoelectronic Devices
Test Facilities, Equipment and Methods
Distribution Statement : APPROVED FOR PUBLIC RELEASE