Accession Number : AD0262391

Title :   LOW-ENERGY SPUTTERING STUDIES

Corporate Author : GENERAL DYNAMICS/ASTRONAUTICS SAN DIEGO CALIF

Personal Author(s) : MCKEOWN,DANIEL ; CABEZAS,AMADO ; MACKENZIE,EDWARD T.

Report Date : 14 JUL 1961

Pagination or Media Count : 1

Abstract : A study has been made on the sputtering of gold and aluminum in beams of noble gases at normal incidence between 0 and 1000 ev. Gold was bombarded by He(+), Ne(+), Ar(+), and Xe(+), and aluminum by Ne(+), Ar(+), and Kr(+). Sputtering was measured by the crystal oscillator method. Using 20-Mc crystals in the oscillator, it was possible to detect the average sputtering of 0.01 angstrom from a surface. Secondary electron emission from the target was suppressed, and sputtering yields, mu, are given in atoms per ion. Increases in mu with beam energy are a more nearly linear function than has been previously reported in terms of mu/1 + gamma, where gamma is the number of secondary electrons emitted per incident ion. The experimental results are interpreted and analyzed in the light of present theories on sputtering yields and thresholds. (Author)

Descriptors :   *ALUMINUM, *GOLD, *RARE GASES, *ION BOMBARDMENT, *SECONDARY EMISSION, ARGON, CRYSTAL OSCILLATORS, HELIUM, INSTRUMENTATION, ION BEAMS, NEON, SOLID STATE PHYSICS, XENON

Distribution Statement : APPROVED FOR PUBLIC RELEASE