Accession Number : AD0287650

Title :   DEVELOPMENT OF MICROELECTRONIC CIRCUITS FOR LINEAR APPLICATIONS

Corporate Author : NAVAL AIR DEVELOPMENT CENTER JOHNSVILLE PA AERONAUTICAL ELECTRONIC AND ELECTRICAL LAB

Personal Author(s) : MARTIN,H.B.

Report Date : 16 OCT 1962

Pagination or Media Count : 1

Abstract : Thin film capacitors with a large value of capacitance per unit area were fabricated from stacking a.c. anodized tantalum films. Several stacks containing four capacitors each had a capacitance equivalent to 4 microfarads/sq. in. and a dissipation factor of about 6%. The glow discharge method of depositing thin dielectric films was also studied. After solving the vapor pressure problem of the titanium feed material, it became possible to produce TiO2 deposits consistently. PbTiO3 deposition was also investigated to a limited extent. The main problem in the PbTiO3 film production is the stoichiometry of the deposited layer. The RC oscillator, tuned amplifier and audio amplifier were designed and fabricated using thin films and microelectronic components. (Author)

Descriptors :   *DIELECTRIC FILMS, *MICROMINIATURIZATION (ELECTRONICS), *TANTALUM CAPACITORS, *THIN FILMS (STORAGE DEVICES), ALUMINUM COMPOUNDS, AUDIO AMPLIFIERS, DIOXIDES, ELECTRODEPOSITION, LEAD COMPOUNDS, MANUFACTURING, OSCILLATORS, OXIDES, PROCESSING, TANTALUM COMPOUNDS, TITANATES, TITANIUM COMPOUNDS, TUNED AMPLIFIERS

Distribution Statement : APPROVED FOR PUBLIC RELEASE