Accession Number : AD0287830

Title :   ELECTRON GUN FOR EVAPORATION OF OXIDE FILM

Corporate Author : MASSACHUSETTS INST OF TECH CAMBRIDGE ELECTRONIC SYSTEMS LAB

Personal Author(s) : TALLERICO,PAUL J.

Report Date : JUN 1962

Pagination or Media Count : 1

Abstract : The design and development of 2 types of electron beam sources for evaporation of refractory oxides is described. The first gun, having a hemispherical shape, was expected to have geometrical advantages making it useful for vacuum evaporation applications. However, the electrode configuration required to achieve high current efficiency proved to be an impractical structure. A Pierce gun was developed which is capable of providing a power density of 3 kw/sq cm in a spot size of several sq mm. This concentration of power is adequate to evaporate alumina. A theoretical study presented in the appendix describes the maximization of power density in a Pierce gun where the optimum geometry is determined by both thermal velocity and space charge effects. (Author)

Descriptors :   *ELECTRON BEAMS, *ELECTRON GUNS, *EVAPORATION, *FILMS, *REFRACTORY MATERIALS, ALUMINUM COMPOUNDS, CERAMIC MATERIALS, DENSITY, DESIGN, ELECTRODES, OXIDES, POWER, SPACE CHARGE, THEORY, THERMAL RADIATION, VELOCITY

Distribution Statement : APPROVED FOR PUBLIC RELEASE