Accession Number : AD0431762
Title : EXPERIMENTAL INVESTIGATION OF LITHIUM-ARGON SPUTTERING,
Corporate Author : CALIFORNIA UNIV BERKELEY INST OF ENGINEERING RESEARCH
Personal Author(s) : Malakhof, V. ; Stein, R. P. ; Smith, H. P., Jr.
Report Date : 25 NOV 1963
Pagination or Media Count : 47
Abstract : The angular distribution of the sputtered lithium atoms under bombardment by positive argon ions was investigated. Argon ions were created by an arc discharge and electrostatically accelerated and focused on the target surface. The object of this investigation was to produce a sufficient amount of experimental data to substantiate or modify the already existing theories of angular distribution of the sputtered atoms at the oblique incidence of a low energy ion beam. The results indicate that at low ion energies and oblique angles of incidence the angular distribution is predominantly in the forward hemisphere relative to incident beam direction, and depends on the angle of ion incidence. The maximum forward sputtering current occurs at approximately 90 degrees to the beam direction. At low angles of incidence, i.e., below 30 degress, back-sputtering is possible. There is approximately a 40 degree relationship between the maximum back-sputtering current and the angle of ion incidence. (Author)
Descriptors : (*ION BEAMS, ARGON), (*LITHIUM, ION BOMBARDMENT), PARTICLE BEAMS, PARTICLE ACCELERATOR TECHNIQUES, SCATTERING, IMPURITIES, DISTRIBUTION.
Distribution Statement : APPROVED FOR PUBLIC RELEASE