Accession Number : AD0477292
Title : STUDY OF CONTACT FAILURES IN SEMICONDUCTOR DEVICES.
Descriptive Note : Quarterly rept. no. 2, 22 Mar-21 Jul 65,
Corporate Author : PHILCO CORP LANSDALE PA
Personal Author(s) : Schnable, George L. ; Keen, Ralph S.
Report Date : JAN 1966
Pagination or Media Count : 94
Abstract : Work was directed toward a study of interactions at ohmic contacts. Representative ohmic contact systems which are in wide use, or are likely to be used in electronic devices, are being studied. The objective of initial studies was to develop suitable and sensitive techniques for studying interactions at ohmic contacts. Experiments were performed with a number of binary and ternary systems, including Ag-Sn, Au-Cr, Al-Ta, Au-Al, Al-SiO2, Cr-Ta, Al-Mo, Al-(P2O5.SiO2), and Au-Cr-Ta, and data were obtained concerning interactions in these systems. It was concluded that the measurement of sheet resistivity of binary metal thin-film systems using four in-line probes provides a simple technique for performing exploratory tests to determine whether significant interaction occurs at various temperature stresses, and permits a survey of a relatively large number of bimetal couples to be made. (Author)
Descriptors : (*SEMICONDUCTOR DEVICES, RELIABILITY(ELECTRONICS)), (*METAL FILMS, SEMICONDUCTOR DEVICES), (*FILMS, SEMICONDUCTOR DEVICES), FIXED CONTACTS, ELECTRICAL RESISTANCE, DIFFUSION, SOLID STATE PHYSICS, CHEMICAL REACTIONS, SURFACES, SUBSTRATES, INTEGRATED CIRCUITS, PHASE STUDIES, SILVER, GOLD, ALUMINUM, SILICON COMPOUNDS, DIOXIDES, SEMICONDUCTING FILMS.
Subject Categories : Electrical and Electronic Equipment
Distribution Statement : APPROVED FOR PUBLIC RELEASE