Accession Number : AD0608946

Title :   SPUTTERING.

Descriptive Note : Annual rept. for 1 Nov 63-31 Oct 64,

Corporate Author : GENERAL MILLS INC MINNEAPOLIS MINN

Personal Author(s) : Stuart,R. V. ; Wehner,G. K.

Report Date : 24 NOV 1964

Pagination or Media Count : 48

Abstract : Energy distributions have been determined for atoms sputtered from polycrystalline targets for twenty-three different target materials. Ejection energies are found to depend strongly on the mass of the target atom. Most probable and average ejection energies plotted as a function of the atomic number of the target material show a periodicity in that within each period these energies tend to decrease with increased filling of the d-shell. Average ejection energies range from 6.8 eV for Be to 45 eV for U. Average ejection velocities group mostly around 600,000 cm/sec and range from a high of 1,100,000 cm/sec for Be to a low of 390,000 cm/sec for Ag. (Author)

Descriptors :   (*ION BOMBARDMENT, CRYSTAL SUBSTRUCTURE), (*CRYSTAL SUBSTRUCTURE, ION BOMBARDMENT), (*CRYSTAL STRUCTURE, ION BOMBARDMENT), (*ATOMIC SPECTROSCOPY, CRYSTALS), EJECTION, SINGLE CRYSTALS, IONS, ATOMS, PLASMAS(PHYSICS), SPECTROSCOPY, KRYPTON, BERYLLIUM, SILVER, URANIUM

Distribution Statement : APPROVED FOR PUBLIC RELEASE