Accession Number : AD0631408
Title : THIN-FILM POLYCRYSTALLINE FIELD-EFFECT TRIODE.
Descriptive Note : Quarterly rept. no. 3, 1 Jan-31 Mar 65,
Corporate Author : RCA LABS PRINCETON N J
Personal Author(s) : Weimer,P. K. ; Borkan,H. ; Bowe,J. J. ; Frantz,V. L. ; Hopkins,R. S.
Report Date : JUN 1965
Pagination or Media Count : 56
Abstract : A process for fabricating CdSe thin-film-transistors (TFT's) reproducibly in large arrays has been developed. The deposition of the semiconductor by evaporation upon an unheated substrate is controlled by means of electrical monitoring of a sample TFT deposited on the same blank with the circuit array. Wire grill masks in the vacuum system are used to define the patterns. Integrated thin-film circuits incorporating 540 CdSe TFT's have operated continuously for more than 500 hours without failure. The Hall mobility and resistivity of vacuum -deposited CdSe films have been studied for various deposition conditions. Metal-insulator-semiconductor (M-I-S) structures have been used to study instability mechanisms in the TFT. A systematic program of fabrication and life-testing of CdS TFT's is being carried out. Analog and digital circuits incorporating TFT's were studied. Masks were designed and ordered for a three-input digital gate. (Author)
Descriptors : (*TRIODES, SEMICONDUCTING FILMS), (*TRANSISTORS, SEMICONDUCTING FILMS), CADMIUM, SELENIDES, SULFIDES, CADMIUM ALLOYS, HALL EFFECT, ELECTRICAL RESISTANCE, VAPOR PLATING, VACUUM APPARATUS, MANUFACTURING, SEMICONDUCTOR DEVICES, EVAPORATION, SELENIUM ALLOYS
Subject Categories : Electrical and Electronic Equipment
Distribution Statement : APPROVED FOR PUBLIC RELEASE