Accession Number : AD0632028
Title : EVALUATION OF STANDARD ALUMINUM ELECTRODE THIN FILM CAPACITORS.
Descriptive Note : Technical rept.,
Corporate Author : NAVAL AVIONICS FACILITY INDIANAPOLIS IND
Personal Author(s) : McGuire,W.
Report Date : 17 MAY 1965
Pagination or Media Count : 16
Abstract : The report shows that the characteristics of thin film capacitors utilizing aluminum electrodes and SiO dielectrics can be improved by annealing at 450C. Some indication is given to the effects of various process parameters during dielectric deposition and supports the general concensus that consistently good thin film capacitors are rather difficult to fabricate. (Author)
Descriptors : (*CAPACITORS, *FILMS), ALUMINUM, ELECTRODES, CERAMIC CAPACITORS, ANNEALING, SILICON, MONOXIDES, DIELECTRIC FILMS, ELECTRICAL RESISTANCE, CAPACITANCE
Subject Categories : Electrical and Electronic Equipment
Distribution Statement : APPROVED FOR PUBLIC RELEASE