Accession Number : AD0633009

Title :   TRANSFER OF FABRICATION TECHNOLOGIES OF THIN FILM ACTIVE AND EXTREME ENVIRONMENT PASSIVE DEVICES.

Descriptive Note : Final rept.,

Corporate Author : NAVAL AVIONICS FACILITY INDIANAPOLIS IND

Personal Author(s) : Cowart,M. G. ; McGuire,William

Report Date : 15 MAR 1966

Pagination or Media Count : 199

Abstract : The report describes the transfer of vacuum deposition technologies relative to thin film active devices and high temperature passive devices from Melpar, Incorporated, to the U. S. Naval Avionics Facility, Indianapolis. Detailed descriptions are included of apparatus, materials, test equipment, fabrication procedures, and process parameters. (Author)

Descriptors :   (*FILMS, *MICROELECTRONICS), SEMICONDUCTING FILMS, VAPOR PLATING, VACUUM APPARATUS, SUBSTRATES, METAL FILMS, CAPACITORS, RESISTORS, TRANSISTORS, PROCESSING, CADMIUM ALLOYS, SELENIUM ALLOYS, COMPATIBILITY, RHENIUM, HIGH TEMPERATURE, MANUFACTURING, CIRCUITS, NAVAL RESEARCH

Subject Categories : Electrical and Electronic Equipment
      Fabrication Metallurgy

Distribution Statement : APPROVED FOR PUBLIC RELEASE