Accession Number : AD0633777

Title :   THIN FILM TECHNIQUES FOR SILICON INTEGRATED CIRCUITS.

Descriptive Note : Quarterly progress rept. no. 6, 1 Nov 65-31 Jan 66,

Corporate Author : MOTOROLA INC PHOENIX ARIZ SEMICONDUCTOR PRODUCTS DIV

Personal Author(s) : Terry,L. E. ; Mancini,F.

Report Date : MAY 1966

Pagination or Media Count : 47

Abstract : Resistance of electron beam evaporated cermet films was extended to 30,000 ohms/sq. Using the 30 percent A12O3, 70 percent (TaSi and Cr3Si) powder, reproducibility of cermet deposition is being determined. Series of experiments on sputtered tantalum-silicon resistor films were initiated. Concentric circle 50-ohm resistors were fabricated for the ultrahigh frequency measurements experiments. Reactively sputtered Ta2O5 and SiN2 capacitors to 1.5 pf/sq mil and 0.5 pf/sq mil, respectively. 1000 hour 200C storage tests were completed on 100 IC892 resistor-transistor -capacitor units. IC772 circuit performance was reviewed using 200 ohms/sq and 2500 ohms/sq resistors. IC772 was redesigned to include coupling capacitor. Circular 50-ohm thin film resistor characteristics were measured up to 1000 MHz. (Author)

Descriptors :   (*INTEGRATED CIRCUITS, *SEMICONDUCTING FILMS), (*FILMS, INTEGRATED CIRCUITS), SILICON, CERMETS, VAPOR PLATING, SPUTTERING, RESISTORS, CAPACITORS, COMPATIBILITY, ANODIC COATINGS, GATES(CIRCUITS), COMPUTER LOGIC, AMPLIFIERS, FILMS, STORAGE, ELECTRICAL RESISTANCE

Subject Categories : Electrical and Electronic Equipment
      Ceramics, Refractories and Glass
      Solid State Physics

Distribution Statement : APPROVED FOR PUBLIC RELEASE