Accession Number : AD0634762

Title :   CHROMIUM MASKS FOR MICROCIRCUITRY.

Descriptive Note : Technical rept.,

Corporate Author : ARMY ELECTRONICS COMMAND FORT MONMOUTH N J

Personal Author(s) : Rogel, Alex

Report Date : MAY 1966

Pagination or Media Count : 20

Abstract : A method for preparing durable chromium films which may be used as masks in making photoresist patterns for microcircuitry has been developed. Films deposited by this method were found to have excellent adhesion to glass and silicon and produced good uniform and reproducible patterns. A technique for etching chromium films was developed using a photoresist process and an acid and metal etchant. (Author)

Descriptors :   (*INTEGRATED CIRCUITS, PHOTOENGRAVING), (*FILMS, CHROMIUM), ETCHING, PROCESSING, ELECTRON BEAMS, VAPOR PLATING, GLASS, SILICON

Subject Categories : Electrical and Electronic Equipment
      Ceramics, Refractories and Glass
      Fabrication Metallurgy

Distribution Statement : APPROVED FOR PUBLIC RELEASE