Accession Number : AD0635812
Title : PRODUCTION ENGINEERING MEASURES (PEM) FOR MILLIWAT LOGIC SEMICONDUCTOR INTEGRATED CIRCUITS.
Descriptive Note : Quarterly progress rept. no. 5, 1 Jul-30 Sep 65.
Corporate Author : TEXAS INSTRUMENTS INC DALLAS
Personal Author(s) : Brooks, D. W. ; Simpson,J. D.
Report Date : 30 SEP 1965
Pagination or Media Count : 12
Abstract : Investigation continued on the use of larger double-epitaxial slices for the milliwatt logic process, including the creation of special masks and handling equipment. In order to improve epitaxial film thickness and resistivity, a new reactor was installed, tested, and evaluated. More than twice as many slices are being produced with the new reactor. Assembly flow was improved by installing a two-unit magnetic heater on all bonding machines, adding a process for nickel and duplex gold plating headers to reduce discoloration, and implementing improved techniques for checking temperature and pressure on the bonding machine. (Author)
Descriptors : (*MICROELECTRONICS, INTEGRATED CIRCUITS), (*CIRCUITS, MICROELECTRONICS), (*INTEGRATED CIRCUITS, COMPUTER LOGIC), MANUFACTURING, FILMS, EPITAXIAL GROWTH, DISKS, BONDING, PLATING, TEMPERATURE CONTROL, DEFECTS(MATERIALS)
Subject Categories : Electrical and Electronic Equipment
Distribution Statement : APPROVED FOR PUBLIC RELEASE