Accession Number : AD0643751
Title : PIEZORESISTIVE STRAIN GAGE ACCELEROMETERS.
Descriptive Note : Technical rept.,
Corporate Author : PICATINNY ARSENAL DOVER N J ENGINEERING SCIENCES LAB
Personal Author(s) : Evans,E. J.
Report Date : DEC 1966
Pagination or Media Count : 78
Abstract : Semiconductor strain gages have been successfully integrated by diffusion into silicon spring members, resulting in microelectronic transducers. This concept of using force as an input parameter to an integrated circuit has been shown to be feasible for many military applications including accelerometers, pressure transducers, and vibration pickups. The principal topics covered in this report are (1) characterization of integrated semiconductor strain gage materials, (2) theory of integrated transducer design for a military environment, (3) integrated circuit force sensor fabrication techniques, and (4) design, fabrication, and evaluation of a typical accelerometer. (Author)
Descriptors : (*ACCELEROMETERS, STRAIN GAGES), (*STRAIN GAGES, SEMICONDUCTOR DEVICES), (*PIEZOELECTRIC TRANSDUCERS, MICROELECTRONICS), PIEZOELECTRIC EFFECT, SILICON, SPRINGS, INTEGRATED CIRCUITS, MILITARY REQUIREMENTS, ELECTRICAL RESISTANCE, THERMISTORS, BORON
Subject Categories : Electrical and Electronic Equipment
Test Facilities, Equipment and Methods
Distribution Statement : APPROVED FOR PUBLIC RELEASE