Accession Number : AD0648018

Title :   REACTIVELY SPUTTERED CERMET RESISTORS.

Descriptive Note : Final rept. May 65-May 66,

Corporate Author : ROME AIR DEVELOPMENT CENTER GRIFFISS AFB N Y RELIABILITY BRANCH

Personal Author(s) : Lane,Clyde H. ; Farrell,John P.

Report Date : JAN 1967

Pagination or Media Count : 33

Abstract : A dual cathode sputtering technique for creating thin cermet films is described in this report. This technique was actually used to produce four types of mixtures: gold-tungsten oxide, platinum-tungsten oxide, platinum tantalum oxide, and gold tantalum oxide. Various resistor parameters are presented for all of the films. However, the emphasis is on the gold tantalum mixtures which gave a zero temperature coefficient at approximately 6 to 8 thousand ohms per square sheet resistivity. A summation is presented on this work and suggestions for further efforts in this field. (Author)

Descriptors :   (*RESISTORS, CERMETS), SPUTTERING, FILMS, MICROELECTRONICS, GOLD, TUNGSTEN COMPOUNDS, OXIDES, PLATINUM, TANTALUM COMPOUNDS, MIXTURES

Subject Categories : Electrical and Electronic Equipment

Distribution Statement : APPROVED FOR PUBLIC RELEASE