Accession Number : AD0650990

Title :   AN INVESTIGATION OF VACUUM DEPOSITED MULTILAYER THIN FILM CAPACITORS,

Corporate Author : JOHNS HOPKINS UNIV SILVER SPRING MD APPLIED PHYSICS LAB

Personal Author(s) : Gordon,S. H.

Report Date : 18 APR 1962

Pagination or Media Count : 17

Abstract : An investigation was made of vacuum deposited multilayer thin film capacitors to reduce the area required for a given value of capacitance.

Descriptors :   (*CAPACITORS, FILMS), VACUUM APPARATUS, VAPOR PLATING, MICROELECTRONICS, MANUFACTURING, CIRCUITS, DIELECTRIC FILMS

Subject Categories : Electrical and Electronic Equipment

Distribution Statement : APPROVED FOR PUBLIC RELEASE