Accession Number : AD0654427

Title :   THIN FILM CIRCUIT TECHNIQUES,

Corporate Author : JOHNS HOPKINS UNIV SILVER SPRING MD APPLIED PHYSICS LAB

Personal Author(s) : Byron,Ernest

Report Date : 19 SEP 1960

Pagination or Media Count : 25

Abstract : A primary practical problem in the fabrication of thin film circuits is the development of a mask changer. If entire circuits are to be fabricated with dispatch, registration of numerous masks without 'breaking' the vacuum is necessary. This report deals with the fabrication of a 5 x 5 resistance matrix requiring four masks. The matrix although merely a vehicle for the design of a mask changer, required alignment of successive masks to within 5 mils without evacuating the chamber between each deposition. In addition to the matrix, capacitors of the order of 0.047 microfarads per sq. inch and associated topics such as masking, etching, substrates, and materials are also considered. (Author)

Descriptors :   (*CIRCUITS, FILMS), MASKING, MANUFACTURING, ETCHING, SUBSTRATES

Subject Categories : Electrical and Electronic Equipment
      Mfg & Industrial Eng & Control of Product Sys

Distribution Statement : APPROVED FOR PUBLIC RELEASE