Accession Number : AD0660319

Title :   HIGH PERFORMANCE THIN FILMS FOR MICROCIRCUITS.

Descriptive Note : Quarterly rept. no. 9, 1 Mar-31 May 67,

Corporate Author : RADIO CORP OF AMERICA SOMERVILLE N J DEFENSE MICROELECTRONICS

Personal Author(s) : Topfer,Morton L. ; Huber,Franz ; Laznovsky,William H. ; Mitchell,Joseph H.

Report Date : OCT 1967

Pagination or Media Count : 24

Abstract : Thin film test resistors have been fabricated with different deposition times. Resistance vs. temperature tests have been made on some samples ranging from 6 to 570 ohms/square. A temperature coefficient of resistance (TCR) curve was plotted from -25 to +150C for samples fabricated in the same manner. The TCR value for these samples ranges from +1000 ppm to -70 ppm, depending upon the sheet resistance of the sample. (Author)

Descriptors :   (*RESISTORS, *FILMS), (*MICROELECTRONICS, *CIRCUITS), DEPOSITION, SPUTTERING, ANODIC COATINGS, ELECTRICAL RESISTANCE, SUBSTRATES, HAFNIUM, MANUFACTURING, HAFNIUM COMPOUNDS, DIOXIDES, SILICON, INTEGRATED CIRCUITS

Subject Categories : Electrical and Electronic Equipment

Distribution Statement : APPROVED FOR PUBLIC RELEASE