Accession Number : AD0665634
Title : HIGH-INFORMATION-DENSITY STORAGE SURFACES.
Descriptive Note : Quarterly rept. no. 10, 1 Jul-30 Sep 67,
Corporate Author : STANFORD RESEARCH INST MENLO PARK CALIF
Personal Author(s) : Rogers,K. T. ; Kelly,J.
Report Date : FEB 1968
Pagination or Media Count : 28
Abstract : The program is devoted to the preparation and investigation of two novel kinds of electron-beam-addressable storage elements of submicron size and densely packed arrays of these elements. One such element, called a micro-cap, consists of an isolated microcapacitor at the bottom of a hole in a metal/dielectric/metal film sandwich. The other element, called a micro-ring, consists of an isolated metal film ring embedded concentrically with a hole in the dielectric of a multilayer metal/dielectric film sandwich. During this quarter, storage and readout data on micro-cap elements were taken at high beam energies (around and above the upper unity-crossover energy for secondary-electron emission and up to the bombardment-induced conductivity energy) for data storage. Beam measurements are reported on the mildly bakeable (400 degrees C) field emitter and molybdenum lens system in its commercial ultra-high-vacuum system. Work on storage structures is being concentrated on attempts to make regular arrays with a commercial electron probe. Progress on the use of this instrument and on the steps of etching subsequent to the line-ruling is reported. (Author)
Descriptors : (*DATA STORAGE SYSTEMS, *MICROELECTRONICS), (*THIN FILM STORAGE DEVICES, SANDWICH CONSTRUCTION), CAPACITORS, DIELECTRIC FILMS, SECONDARY EMISSION, FIELD EMISSION, ETCHING, ELECTRON MICROSCOPY, ELECTRON BEAMS, VACUUM APPARATUS, STORAGE TUBES, ELECTRON GUNS
Subject Categories : Computer Hardware
Distribution Statement : APPROVED FOR PUBLIC RELEASE