Accession Number : AD0666776
Title : HIGH PERFORMANCE THIN FILMS FOR MICROCIRCUITS.
Descriptive Note : Quarterly rept. no. 11, 1 Sep-30 Nov 67,
Corporate Author : RADIO CORP OF AMERICA SOMERVILLE N J DEFENSE MICROELECTRONICS
Personal Author(s) : Topfer,Morton L. ; Mitchell,Joseph H. ; Schelhorn,Robert L.
Report Date : MAR 1968
Pagination or Media Count : 41
Abstract : The TCR-vs.-ohms/sq. curve for hafnium thin-film resistors prepared on glass substrates is plotted and compared to that of samples prepared on glazed ceramic substrates. A technique for forming fine-line (0.5 mil) resistor patterns of hafnium has been developed. MOM capacitors and chip-size resistors using hafnium technology and related anodization processing were fabricated on passivated silicon wafers. Details of the work on hafnium-dioxide insulated MOS devices are presented. In addition, evaluation of the hafnium-dioxide films using C-V measurements is reported. A multivibrator circuit has been chosen as an experimental vehicle. The layout and masks for this circuit are presented. (Author)
Descriptors : (*INTEGRATED CIRCUITS, FILMS), OXIDES, HAFNIUM COMPOUNDS, OXIDES, RESISTORS, SPUTTERING, ANODIC COATINGS, SILICON, SUBSTRATES, CIRCUITS, MICROELECTRONICS, METAL COATINGS
Subject Categories : Electrical and Electronic Equipment
Distribution Statement : APPROVED FOR PUBLIC RELEASE