Accession Number : AD0674688
Title : CERTAIN PROBLEMS OF PHYSICS OF THIN FILMS (NEKOTORYE PROBLEMY FIZIKI TONKIKH PLENOK),
Corporate Author : FOREIGN TECHNOLOGY DIV WRIGHT-PATTERSON AFB OHIO
Personal Author(s) : Nakhodkin,N. G.
Report Date : 09 NOV 1967
Pagination or Media Count : 29
Abstract : This is a review article dealing with the present state of the art in the production of thin films (10-1000 A thick) and the study of their physical properties. The subjects covered are: (1) Control of the growth and crystallization of films to obtain prescribed structure and dimensions, including the influence of factors such as condensation and crystallization centers, substrate temperature, impurities and adsorbed gases, catalytic processes, and the effect of electrons and other particles. (2) Problems in the kinetics of electrons in thin films (electric conductivity of thin films and the size effect, electric conductivity of superthin films, metaldielectric film systems, and possible use of polymer materials in film electronics).
Descriptors : (*METAL FILMS, PHYSICAL PROPERTIES), DIELECTRIC FILMS, SEMICONDUCTING FILMS, VAPOR PLATING, VACUUM APPARATUS, MICROELECTRONICS, INTEGRATED CIRCUITS, SUBSTRATES, CRYSTAL GROWTH, BAND THEORY OF SOLIDS, ELECTRICAL CONDUCTIVITY, ADSORPTION, IMPURITIES, USSR
Subject Categories : Physical Chemistry
Solid State Physics
Distribution Statement : APPROVED FOR PUBLIC RELEASE