Accession Number : AD0675398
Title : ANALYSIS OF THERMAL DECOMPOSITION OF TETRAETHOXYSILANE BY GAS CHROMATOGRAPHY.
Descriptive Note : Research and development rept.,
Corporate Author : ARMY ELECTRONICS COMMAND FORT MONMOUTH N J
Personal Author(s) : Heumisch,George W.
Report Date : JUL 1968
Pagination or Media Count : 15
Abstract : Tetraethoxysilane was thermally decomposed in apparatus similar to that used by the electronics industry to deposit silicon dioxide. A study of the decomposition reaction was made from the aspect of collected products. The reaction products were collected and analyzed by gas-liquid chromatography, and a mixture of acetaldehyde, ethane, ethanol, and ethylene was found. Comparison with the thermal decomposition products of diethyl ether suggests possible mechanisms for the decomposition of tetraethoxysilane. (Author)
Descriptors : (*SILICON DIOXIDE, VAPOR PLATING), (*SILOXANES, PYROLYSIS), GAS CHROMATOGRAPHY, SILANES, DECOMPOSITION, ALDEHYDES, ALKANES, ETHANOLS, ETHYLENES, DIELECTRIC FILMS, PREPARATION
Subject Categories : Physical Chemistry
Distribution Statement : APPROVED FOR PUBLIC RELEASE