Accession Number : AD0678469
Title : SPUTTERING OF STAINLESS STEEL WITH H (+) sub 1 IONS AND THEIR PENETRATION INTO THE SURFACE,
Corporate Author : FOREIGN TECHNOLOGY DIV WRIGHT-PATTERSON AFB OHIO
Personal Author(s) : Borovik,E. S. ; Katrich,N. P. ; Nikolaev,G. T.
Report Date : 15 DEC 1967
Pagination or Media Count : 9
Abstract : The coefficient of sputtering, alpha, of stainless steel, 18N9T, with H(+) sub 1 of 35 keV, and of penetration of the ions into the surface, eta, were detected by the method described previously (loc. cit.). Not the change in the weight of the target, delta P sub t, but the change in the weight of the collector, delta P sub c, should be used in the calculation of alpha on the other hand, in the calculation of eta the sum of the two should be used: alpha = delta P sub c/ (9.3 x 10 to the minus 23 power i/qt) and eta = (delta P sub c + delta P sub t)/(1.67 x 10 to the minus 24th power i/qt), where i is the current of the beam H(+) sub 1, q is the electron charge, and t is the duration of sputtering. At pressures p < or = 10 to the minus 9th power mm, alpha = 0.009 and eta = 0.5. The effect of CO, O, CH4, CO2, and H2O was detected.
Descriptors : (*STAINLESS STEEL, *SPUTTERING), HYDROGEN, PENETRATION, SURFACES, ION BOMBARDMENT, ION BEAMS, IONS, USSR
Subject Categories : Metallurgy and Metallography
Mfg & Industrial Eng & Control of Product Sys
Nuclear Physics & Elementary Particle Physics
Distribution Statement : APPROVED FOR PUBLIC RELEASE