Accession Number : AD0681768

Title :   THIN FILM PASSIVE CIRCUIT RESEARCH,

Corporate Author : GENERAL DYNAMICS/ASTRONAUTICS SAN DIEGO CALIF

Personal Author(s) : Celto,J. E.

Report Date : 14 APR 1961

Pagination or Media Count : 24

Abstract : The report describes the fabrication of thin film passive components. It is divided into three main parts. The first section describes those preparations made prior to components and circuit fabrication, the second describes the fabrication period, and the last discusses the outcome of an evaluation of the progress achieved during the first two phases. Additional introductory comments precede each of the three sections. (Author)

Descriptors :   (*INTEGRATED CIRCUITS, MANUFACTURING), MICROELECTRONICS, VAPOR PLATING, VACUUM APPARATUS, PASSIVE SYSTEMS, ANODIC COATINGS, ETCHING

Subject Categories : Electrical and Electronic Equipment
      Mfg & Industrial Eng & Control of Product Sys

Distribution Statement : APPROVED FOR PUBLIC RELEASE