Accession Number : AD0683531
Title : VAPOR SOLID NUCLEATION: KINETICS OF FORMATION OF EPITAXIAL THIN FILMS.
Descriptive Note : Final rept.,
Corporate Author : BATTELLE MEMORIAL INST COLUMBUS OHIO COLUMBUS LABS
Personal Author(s) : Gretz,R. D.
Report Date : 31 JAN 1969
Pagination or Media Count : 56
Abstract : The objective of the work was to clarify the interrelationship of competitive processes in the incidence of epitaxy in the vapor deposition system gold on molybdenum. A new contamination effect caused by oil diffusion pumps was discovered that caused an evanescent approach toward the major objective. For this reason a getter pump LEED system was constructed in order that structures formed during vapor deposition could be discerned in a contaminant free system. (Author)
Descriptors : (*METAL FILMS, *EPITAXIAL GROWTH), (*VAPOR PLATING, DYNAMICS), ELECTRON DIFFRACTION, CHEMICAL CONTAMINATION, VACUUM APPARATUS, NUCLEATION, MOLYBDENUM, GOLD
Subject Categories : Physical Chemistry
Metallurgy and Metallography
Distribution Statement : APPROVED FOR PUBLIC RELEASE