Accession Number : AD0695234

Title :   THE USE OF ELECTRON BEAMS FOR VISUAL CONTROL DURING THE EXECUTION OF CERTAIN PHYSICO-TECHNOLOGICAL PROCESSES,

Corporate Author : FOREIGN TECHNOLOGY DIV WRIGHT-PATTERSON AFB OHIO

Personal Author(s) : Derkach,V. P. ; Kobenchuk,G. F.

Report Date : 03 APR 1969

Pagination or Media Count : 11

Abstract : In many laboratory investigations and, particularly, when working on the technique of preparing microcircuits in a vacuum chamber, along with precise measurements of individual parameters, it is frequently necessary to have visual observation of the base layer as a form of quality control. This is usually done directly through an observation window or with the aid of special optical devices or scanning microscopes which give an image of objects in electron rays and in x-rays arising under electron bombardment. Scanning microscopes make it possible to observe the topography of the object's surface, its structure, the presence of defects, the arrangement of microcircuit components. The resolving power of these microscopes is several microns and can reach hundreds of angstroms. (Author)

Descriptors :   (*DIGITAL SYSTEMS, ASSEMBLY), (*QUALITY CONTROL, ELECTRON BEAMS), MICROELECTRONICS, CONTROL, VISUAL INSPECTION, ELECTRON MICROSCOPY, OPTICAL EQUIPMENT, USSR

Subject Categories : Electrical and Electronic Equipment
      Mfg & Industrial Eng & Control of Product Sys

Distribution Statement : APPROVED FOR PUBLIC RELEASE