Accession Number : AD0695673

Title :   LOW-VALUE TANTALUM THIN-FILM RESISTORS,

Corporate Author : HARRY DIAMOND LABS WASHINGTON D C

Personal Author(s) : Bender,Albert D. ; Lieberman,Stuart I.

Report Date : APR 1969

Pagination or Media Count : 43

Abstract : Low value resistors were fabricated with mean values within about 10 percent of design and with confidence limits (2 sigma) within about plus or minus 20 percent of the mean, which compare favorably with the results previously reported on tantalum thin-film resistors greater than 3.3 kohms. The best resistors were designed with parallel elements having 1/2-mil line widths and an aspect ratio (length/width) of 4. (Author)

Descriptors :   (*RESISTORS, TANTALUM), METAL FILMS, MANUFACTURING, SPUTTERING, INTEGRATED CIRCUITS, COMPATIBILITY

Subject Categories : Electrical and Electronic Equipment

Distribution Statement : APPROVED FOR PUBLIC RELEASE