Accession Number : AD0698436

Title :   CERTAIN PROBLEMS ARISING IN ELECTRON-BEAM-CONTROLLED MICROCIRCUIT MANUFACTURING PROCESSES,

Corporate Author : FOREIGN TECHNOLOGY DIV WRIGHT-PATTERSON AFB OHIO

Personal Author(s) : Derkach,V. P.

Report Date : 13 AUG 1969

Pagination or Media Count : 17

Abstract : The report investigates some problems which occur in the control of electron ray technological processes used in the production of microcircuitry. A brief 'state-of-the-art' review is made, in which the limitations of manual control of microminiature production are cited, and the possibilities of applying automatic process control to three-dimensional microminiaturization are discussed. One problem is the localizing of heat at one component without excessive disturbance of the temperature equilibrium at adjacent components. The heat energy stream is given by a combination of equations. Other equations developed by the author are related to the number of impulses applied, material vaporization rates, heating and cooling rates, and other controllable parameters. The author discusses some of the basic features of a possible numberical control unit which could be used with existing production machinery. (Author)

Descriptors :   (*CIRCUITS, MICROELECTRONICS), (*MANUFACTURING, CIRCUITS), ELECTRON BEAMS, CONTROL SYSTEMS, RELIABILITY(ELECTRONICS), PRODUCTION CONTROL, AUTOMATION, USSR

Subject Categories : Electrical and Electronic Equipment
      Mfg & Industrial Eng & Control of Product Sys

Distribution Statement : APPROVED FOR PUBLIC RELEASE