Accession Number : AD0700975
Title : HIGH-INFORMATION-DENSITY STORAGE SURFACES.
Descriptive Note : Quarterly rept. no. 18, 1 Jul-30 Sep 69,
Corporate Author : STANFORD RESEARCH INST MENLO PARK CALIF
Personal Author(s) : Heynick,Louis N.
Report Date : JAN 1970
Pagination or Media Count : 39
Abstract : The program is devoted to the preparation and investigation of novel electron-beam addressable storage mosaics and to the construction of an experimental, large-capacity high-speed data-storage system utilizing such mosaics. The storage mosaics currently under development have elements consisting of discrete, submicron-size capacitors, called 'micro-caps,' at the bases of regular arrays of closely spaced holed in molybdenum alumina/molybdenum film sandwiches on sapphire substrates. A basic technique developed for storage-mosaic formation is the use of a fine-mesh screen as an array of electrostatic electron lenses for resist exposure. In this technique, all apertures of the screen simultaneously form highly demagnified images, on electron-sensitive resist, of a simple object pattern such as a small, electron-illuminated array of holes. The geometric and electron-optical parameters are chosen so as to yield the requisite storage-element packing density. The preparation and use of high-precision, 1000-mesh screens and the recent improvements of the electron-illumination system for the object pattern now permit the formation of regular arrays of images over almost a full square centimeter of area. Each image consists of a 10 x 10 array of 1/2-micron spots on 1-micron centers and the images are on 25.4-micron centers, corresponding to a capacity of approximately 10 to the 7th power bits/sq cm. Complete storage mosaics of micron-cap elements in Mo/AlO3/Mo film sandwiches are now being prepared. (Author)
Descriptors : (*DATA STORAGE SYSTEMS, THIN FILM STORAGE DEVICES), (*THIN FILM STORAGE DEVICES, MANUFACTURING), ELECTRON OPTICS, ELECTRON BEAMS, FILMS, MICROELECTRONICS, MOLYBDENUM, ALUMINA, CAPACITORS, ETCHING
Subject Categories : Computer Hardware
Distribution Statement : APPROVED FOR PUBLIC RELEASE