Accession Number : AD0707622

Title :   INTEGRATED MICROMOTOR CONCEPTS,

Corporate Author : STANFORD UNIV CA DEPT OF ELECTRICAL ENGINEERING

Personal Author(s) : Dutta, K. ; Dev, P. ; Dewilde, R. ; Sharma, B. ; Newcomb, R. W.

Report Date : JUN 1970

Pagination or Media Count : 4

Abstract : The concept of an integrated micromotor is introduced and the philosophy of operation and fabrication are discussed. The motor considered has a working surface which covers a circular area of 200 microns radius. The final device has an eddy current driven free rotor floating on spiral groove bearings and is processed on a silicon chip using monolithic and compatible thin film fabrication techniques. (Author)

Descriptors :   *ELECTRIC MOTORS, MICROELECTRONICS, INTEGRATED CIRCUITS, GAS BEARINGS, INTEGRATED SYSTEMS.

Subject Categories : Electrical and Electronic Equipment

Distribution Statement : APPROVED FOR PUBLIC RELEASE