Accession Number : AD0707622
Title : INTEGRATED MICROMOTOR CONCEPTS,
Corporate Author : STANFORD UNIV CA DEPT OF ELECTRICAL ENGINEERING
Personal Author(s) : Dutta, K. ; Dev, P. ; Dewilde, R. ; Sharma, B. ; Newcomb, R. W.
Report Date : JUN 1970
Pagination or Media Count : 4
Abstract : The concept of an integrated micromotor is introduced and the philosophy of operation and fabrication are discussed. The motor considered has a working surface which covers a circular area of 200 microns radius. The final device has an eddy current driven free rotor floating on spiral groove bearings and is processed on a silicon chip using monolithic and compatible thin film fabrication techniques. (Author)
Descriptors : *ELECTRIC MOTORS, MICROELECTRONICS, INTEGRATED CIRCUITS, GAS BEARINGS, INTEGRATED SYSTEMS.
Subject Categories : Electrical and Electronic Equipment
Distribution Statement : APPROVED FOR PUBLIC RELEASE