Accession Number : AD0709325

Title :   CHARACTERIZATION OF SILICON SURFACES BY THE ELECTRON ENERGY LOSS SPECTRUM,

Corporate Author : BOEING SCIENTIFIC RESEARCH LABS SEATTLE WASH

Personal Author(s) : Wei,P. S. P.

Report Date : JUN 1970

Pagination or Media Count : 9

Abstract : The energy loss spectra of silicon during several stages of the cleaning treatment have been studied in a LEED apparatus. A layer of beta-SiC formed on the silicon surface is detected. The results suggest that the energy loss spectrum is sensitive to the change in chemical composition and electronic structure of the solid surface. (Author)

Descriptors :   (*SILICON, SURFACE PROPERTIES), CARBON, CHEMICAL CONTAMINATION

Subject Categories : Physical Chemistry

Distribution Statement : APPROVED FOR PUBLIC RELEASE