Accession Number : AD0709652
Title : RESEARCH ON THE SPUTTERING OF MULTICOMPONENT MATERIALS BY ION BOMBARDMENT.
Descriptive Note : Status rept.,
Corporate Author : MINNESOTA UNIV MINNEAPOLIS PHYSICAL ELECTRONICS LAB
Personal Author(s) : Wehner,G. K.
Report Date : MAY 1970
Pagination or Media Count : 33
Abstract : Results are given of (1) a study of the cone formation which arises at the surface of a high sputtering yield target such as Cu when it is seeded during sputtering with another material such as Mo, and (2) the analysis of composition changes at the surface of multicomponent targets under ion bombardment and of sputter deposited films by means of in situ auger electron analysis. (Author)
Descriptors : (*SPUTTERING, SURFACE PROPERTIES), (*COPPER, SPUTTERING), (*ION BOMBARDMENT, COPPER), CHEMICAL ANALYSIS, MOLYBDENUM, FILMS
Subject Categories : Properties of Metals and Alloys
Distribution Statement : APPROVED FOR PUBLIC RELEASE