Accession Number : AD0710906

Title :   METHODS OF MEASUREMENT FOR SEMICONDUCTOR MATERIALS, PROCESS CONTROL, AND DEVICES.

Descriptive Note : Quarterly rept. 1 Oct-31 Dec 69,

Corporate Author : NATIONAL BUREAU OF STANDARDS WASHINGTON D C ELECTRONIC TECHNOLOGY DIV

Personal Author(s) : Bullis,W. Murray

Report Date : MAY 1970

Pagination or Media Count : 64

Abstract : The quarterly progress report, sixth of a series, describes NBS activities directed toward the development of methods of measurement for semiconductor materials, process control, and devices. Principal emphasis is placed on measurement of resistivity, carrier lifetime, and electrical inhomogeneities in semiconductor crystals; evaluation of wire bonds, metallization adhesion, and die attachment; and measurement of thermal properties of semiconductor devices and electrical properties of microwave devices. Work on related projects on silicon nuclear radiation detectors and specification of germanium for gamma-ray detectors is also described. Supplementary data concerning staff, standards committee activities, technical services, and publications are included as appendixes. (Author)

Descriptors :   (*SEMICONDUCTORS, ELECTRICAL PROPERTIES), (*SEMICONDUCTOR DEVICES, QUALITY CONTROL), ELECTRICAL RESISTANCE, ELECTRIC TERMINALS, THERMAL PROPERTIES, MICROWAVE EQUIPMENT, GAMMA COUNTERS, INTEGRATED CIRCUITS, BONDING, SILICON, GERMANIUM, TEST METHODS, CARRIERS(SEMICONDUCTORS), RELIABILITY(ELECTRONICS)

Subject Categories : Electrical and Electronic Equipment
      Fabrication Metallurgy
      Test Facilities, Equipment and Methods
      Nuclear Instrumentation
      Solid State Physics

Distribution Statement : APPROVED FOR PUBLIC RELEASE