Accession Number : AD0711938
Title : CLEAN ROOM FOR MICRO-MINIATURIZATION PHOTOGRAPHIC FACILITY.
Descriptive Note : Technical rept.,
Corporate Author : ARMY ELECTRONICS COMMAND FORT MONMOUTH N J
Personal Author(s) : Lechner,Richard A.
Report Date : SEP 1970
Pagination or Media Count : 22
Abstract : The report covers the design and construction of a horizontal laminar flow clean room complex which supports the operation of a Borrowdale micro-miniaturization camera. Temperature and humidity controlled ultraclean ambient conditions were provided to assure clean and undistorted photographic masks which are used in the photolithographic process of fabricating micro-miniature circuits. All the rooms of the complex are Class 100 except for a general work space which is Class 100,000. Under clean room conditions, image reductions are only limited by the resolution of the photographic emulsions. (Author)
Descriptors : (*CLEAN ROOMS, DESIGN), (*MICROPHOTOGRAPHY, CAMERAS), (*CAMERAS, CLEAN ROOMS), PARTICLE SIZE, GAS FILTERS, LAMINAR FLOW, CONSTRUCTION MATERIALS, SITE SELECTION
Subject Categories : Test Facilities, Equipment and Methods
Distribution Statement : APPROVED FOR PUBLIC RELEASE