Accession Number : AD0711938

Title :   CLEAN ROOM FOR MICRO-MINIATURIZATION PHOTOGRAPHIC FACILITY.

Descriptive Note : Technical rept.,

Corporate Author : ARMY ELECTRONICS COMMAND FORT MONMOUTH N J

Personal Author(s) : Lechner,Richard A.

Report Date : SEP 1970

Pagination or Media Count : 22

Abstract : The report covers the design and construction of a horizontal laminar flow clean room complex which supports the operation of a Borrowdale micro-miniaturization camera. Temperature and humidity controlled ultraclean ambient conditions were provided to assure clean and undistorted photographic masks which are used in the photolithographic process of fabricating micro-miniature circuits. All the rooms of the complex are Class 100 except for a general work space which is Class 100,000. Under clean room conditions, image reductions are only limited by the resolution of the photographic emulsions. (Author)

Descriptors :   (*CLEAN ROOMS, DESIGN), (*MICROPHOTOGRAPHY, CAMERAS), (*CAMERAS, CLEAN ROOMS), PARTICLE SIZE, GAS FILTERS, LAMINAR FLOW, CONSTRUCTION MATERIALS, SITE SELECTION

Subject Categories : Test Facilities, Equipment and Methods
      Photography

Distribution Statement : APPROVED FOR PUBLIC RELEASE