Accession Number : AD0726553
Title : A Study of Simultaneous Solid State Diffusion in Fabrication of Integrated Circuits (from Doped Silicafilms).
Descriptive Note : Master's thesis,
Corporate Author : AIR FORCE INST OF TECH WRIGHT-PATTERSON AFB OHIO SCHOOL OF ENGINEERING
Personal Author(s) : Ross,Alan A.
Report Date : MAR 1971
Pagination or Media Count : 72
Abstract : The study explores three areas. The first is the use of doped Silicafilms as diffusion sources. The second is the use of these Silicafilm diffusion sources in simultaneous diffusion of N and P-type regions. The third is the production of complementary insulated gate field effect transistors using Silicafilm diffusion sources in a triple-diffusion process. The doped Silicafilms were shown to be useful diffusion sources. The simultaneous diffusion was not achieved, and the conclusion is that even if simultaneous diffusion is possible using Silicafilm sources, the gain would not be worth the effort. The triple-diffusion process worked well, and the resulting devices are discussed in the last part of the report. (Author)
Descriptors : (*SEMICONDUCTOR DEVICES, DIFFUSION), (*INTEGRATED CIRCUITS, *MANUFACTURING), SILICON DIOXIDE, FIELD EFFECT TRANSISTORS, DOPING, THESES
Subject Categories : Electrical and Electronic Equipment
Mfg & Industrial Eng & Control of Product Sys
Distribution Statement : APPROVED FOR PUBLIC RELEASE