Accession Number : AD0739986

Title :   Investigation of the Sputtering of Monocrystals of InSb, GaAs and GaSb,

Corporate Author : DEFENCE RESEARCH INFORMATION CENTRE ORPINGTON (ENGLAND)

Personal Author(s) : Nevsorna,L. N. ; Yurasova,V.

Report Date : MAR 1972

Pagination or Media Count : 11

Abstract : The spatial distribution of substances sputtered from monocrystals of compounds A(III)B(V) and also its relation to the time of sputtering, the energy and mass of bombarding ions and the angle of incidence of the ions on the target are investigated. The ion bombardment is accomplished with ions of Ne(+), Kr(+) and Xe(+) with energies from 0.5 to 20 keV. (Author)

Descriptors :   (*SEMICONDUCTORS, *SPUTTERING), ION BOMBARDMENT, INDIUM ANTIMONIDES, GALLIUM ARSENIDES, GALLIUM ALLOYS, ANTIMONY ALLOYS, USSR

Subject Categories : Solid State Physics

Distribution Statement : APPROVED FOR PUBLIC RELEASE