Accession Number : AD0743318

Title :   Piezoelectric-Piezoresistive Coupled Strain Transducer.

Descriptive Note : Master's thesis,

Corporate Author : AIR FORCE INST OF TECH WRIGHT-PATTERSON AFB OHIO SCHOOL OF ENGINEERING

Personal Author(s) : Cline,Gerald L.

Report Date : MAR 1972

Pagination or Media Count : 105

Abstract : The study explores the possibility of using a complementary coupling of the piezoresistive and piezoelectric effects to produce a very sensitive strain transducer. The piezoresistive effect of Si is combined with the piezoelectric effect of a ZnO thin-film in a new type of strain sensor, called the PZER. The polarization field of the ZnO activation layer changes the carrier density in the piezoresistive element. The PZER has up to 280% of the strain sensitivity of a normal piezoresistive strain transducer. The theory, fabrication, and evaluation of the PZER's is thoroughly discussed. (Author)

Descriptors :   (*STRAIN GAGES, *PIEZOELECTRIC TRANSDUCERS), SILICON, ZINC COMPOUNDS, OXIDES, METAL FILMS, PIEZOELECTRIC EFFECT, MANUFACTURING, SPUTTERING, DEPOSITION, TEST METHODS, THESES

Subject Categories : Test Facilities, Equipment and Methods

Distribution Statement : APPROVED FOR PUBLIC RELEASE