Accession Number : AD0743318
Title : Piezoelectric-Piezoresistive Coupled Strain Transducer.
Descriptive Note : Master's thesis,
Corporate Author : AIR FORCE INST OF TECH WRIGHT-PATTERSON AFB OHIO SCHOOL OF ENGINEERING
Personal Author(s) : Cline,Gerald L.
Report Date : MAR 1972
Pagination or Media Count : 105
Abstract : The study explores the possibility of using a complementary coupling of the piezoresistive and piezoelectric effects to produce a very sensitive strain transducer. The piezoresistive effect of Si is combined with the piezoelectric effect of a ZnO thin-film in a new type of strain sensor, called the PZER. The polarization field of the ZnO activation layer changes the carrier density in the piezoresistive element. The PZER has up to 280% of the strain sensitivity of a normal piezoresistive strain transducer. The theory, fabrication, and evaluation of the PZER's is thoroughly discussed. (Author)
Descriptors : (*STRAIN GAGES, *PIEZOELECTRIC TRANSDUCERS), SILICON, ZINC COMPOUNDS, OXIDES, METAL FILMS, PIEZOELECTRIC EFFECT, MANUFACTURING, SPUTTERING, DEPOSITION, TEST METHODS, THESES
Subject Categories : Test Facilities, Equipment and Methods
Distribution Statement : APPROVED FOR PUBLIC RELEASE