Accession Number : AD0743658

Title :   Production of Epitaxial Single-Crystal Copper Films 5000 to 8000 Angstroms Thick and Accurate Determination of Their Orientation by Means of the Channeling Effect,

Corporate Author : FOREIGN TECHNOLOGY DIV WRIGHT-PATTERSON AFB OHIO

Personal Author(s) : Markus,A. M. ; Fainshtein,A. L.

Report Date : 04 APR 1972

Pagination or Media Count : 8

Abstract : The growth of epitaxial single crystal copper films 5000 to 8000 angstroms thick on a fresh rock salt clevage heated to 320C is described. Disposition took place in a given vacuum at a rate of 10 to 15 A/sec. The resultant film being annealed at the same temperature for 1 hr. The orientation of the epitaxial film and the degree of perfection of its single crystal structure were studied by a method based on the channelling effect, using a 130 to 180 keV proton beam. Films deposited on the NaCl face had an accurate orientation throughout their whole thickness. (Author)

Descriptors :   (*EPITAXIAL GROWTH, METAL FILMS), COPPER, METAL CRYSTALS, SINGLE CRYSTALS, USSR

Subject Categories : Crystallography

Distribution Statement : APPROVED FOR PUBLIC RELEASE