Accession Number : AD0744272

Title :   Device for Deposition of Film Microcircuits,

Corporate Author : FOREIGN TECHNOLOGY DIV WRIGHT-PATTERSON AFB OHIO

Personal Author(s) : Dynkov,B. N. ; Evteev,F. E. ; Samarskaya,M. K. ; Dmitriev,P. A.

Report Date : 04 APR 1972

Pagination or Media Count : 8

Abstract : A unit for the deposition for film microcircuits, containing a vacuum chamber with a mechanism for lifting the chambers hood, drive mechanism to move the substrates and stencils placed on movable platforms, shielding partition and adjusting plate, is described. (Author)

Descriptors :   (*INTEGRATED CIRCUITS, VAPOR PLATING), MANUFACTURING, PATENTS, USSR

Subject Categories : Electrical and Electronic Equipment
      Mfg & Industrial Eng & Control of Product Sys

Distribution Statement : APPROVED FOR PUBLIC RELEASE