Accession Number : AD0750577
Title : Materials and Interface Factors Limiting LSI (Large Scale Integrated Circuits) Performance and Reliability.
Descriptive Note : Interim rept.,
Corporate Author : HUGHES AIRCRAFT CO CULVER CITY CALIF ELECTRONIC PROPERTIES INFORMATION CENTER
Personal Author(s) : Hall,Thomas C. ; Boschan,Robert H. ; Brammer,William G.
Report Date : AUG 1972
Pagination or Media Count : 45
Abstract : Material, chemical, physical, metallurgical and electrical effects in large scale integreated circuits (LSI) and other semiconductor devices are surveyed. Material transport phenomena, thermochemical and electrochemical effects, properties of metallization systems for semiconductor devices and semiconductor surface effects as they affect device performance and reliability are discussed. Eighty-nine references are provided. (Author)
Descriptors : (*INTEGRATED CIRCUITS, RELIABILITY(ELECTRONICS)), SEMICONDUCTOR DEVICES, MANUFACTURING, ELECTRICAL PROPERTIES, MECHANICAL PROPERTIES, ELECTROCHEMISTRY, STRESS CORROSION
Subject Categories : Electrical and Electronic Equipment
Distribution Statement : APPROVED FOR PUBLIC RELEASE