Accession Number : AD0754875
Title : Ellipsometric Study of a Thin Transparent Film Overlaid on a Transparent Substrate Having a Surface Layer,
Corporate Author : TOKAI UNIV HIRATSUKA (JAPAN) DEPT OF ELECTRO-PHOTO-OPTICS ENGINEERI
Personal Author(s) : Yokota,H. ; Nishibori,M. ; Kinosita,K.
Report Date : 1969
Pagination or Media Count : 13
Abstract : The presence of a very thin surface layer in the substrate surface may have a serious influence on the ellipsometric determination of the refractive index n(f) and thickness d(f) of a film overlaid on a substrate of known index n(b). The surface layer is regarded as a homogeneous film of index n(s), and delta and tan psi are calculated for the system ((n(f),d(f))+(n(s), d(s)) on substrate n(b).
Descriptors : (*FILMS, REFLECTIVITY), REFRACTIVE INDEX, THICKNESS, SURFACES, SUBSTRATES, JAPAN
Subject Categories : Test Facilities, Equipment and Methods
Distribution Statement : APPROVED FOR PUBLIC RELEASE