Accession Number : AD0754875

Title :   Ellipsometric Study of a Thin Transparent Film Overlaid on a Transparent Substrate Having a Surface Layer,

Corporate Author : TOKAI UNIV HIRATSUKA (JAPAN) DEPT OF ELECTRO-PHOTO-OPTICS ENGINEERI

Personal Author(s) : Yokota,H. ; Nishibori,M. ; Kinosita,K.

Report Date : 1969

Pagination or Media Count : 13

Abstract : The presence of a very thin surface layer in the substrate surface may have a serious influence on the ellipsometric determination of the refractive index n(f) and thickness d(f) of a film overlaid on a substrate of known index n(b). The surface layer is regarded as a homogeneous film of index n(s), and delta and tan psi are calculated for the system ((n(f),d(f))+(n(s), d(s)) on substrate n(b).

Descriptors :   (*FILMS, REFLECTIVITY), REFRACTIVE INDEX, THICKNESS, SURFACES, SUBSTRATES, JAPAN

Subject Categories : Test Facilities, Equipment and Methods
      Optics

Distribution Statement : APPROVED FOR PUBLIC RELEASE