Accession Number : AD0754912

Title :   Scanning-Electron-Microscopy of Dielectrics,

Corporate Author : DEFENCE RESEARCH INFORMATION CENTRE ORPINGTON (ENGLAND)

Personal Author(s) : Spivak,G. V. ; Rau,E. J.

Report Date : NOV 1972

Pagination or Media Count : 9

Abstract : When examining samples of low conductivity with a scanning electron microscope (REM) charging of the body and surface takes place. This is brought about by the electrons of the probe. In the majority of cases this leads to a deterioration in the resolution and to a considerable distortion of the image. In order to prevent charging, several methods are discussed.

Descriptors :   (*ELECTRON MICROSCOPY, *DIELECTRICS), RESOLUTION, DISTORTION, USSR

Subject Categories : Test Facilities, Equipment and Methods
      Optics

Distribution Statement : APPROVED FOR PUBLIC RELEASE