Accession Number : AD0754912
Title : Scanning-Electron-Microscopy of Dielectrics,
Corporate Author : DEFENCE RESEARCH INFORMATION CENTRE ORPINGTON (ENGLAND)
Personal Author(s) : Spivak,G. V. ; Rau,E. J.
Report Date : NOV 1972
Pagination or Media Count : 9
Abstract : When examining samples of low conductivity with a scanning electron microscope (REM) charging of the body and surface takes place. This is brought about by the electrons of the probe. In the majority of cases this leads to a deterioration in the resolution and to a considerable distortion of the image. In order to prevent charging, several methods are discussed.
Descriptors : (*ELECTRON MICROSCOPY, *DIELECTRICS), RESOLUTION, DISTORTION, USSR
Subject Categories : Test Facilities, Equipment and Methods
Distribution Statement : APPROVED FOR PUBLIC RELEASE