Accession Number : AD0758762
Title : Fabrication of Elastic Surface Devices by Chemical Etching.
Descriptive Note : Physical sciences research papers,
Corporate Author : AIR FORCE CAMBRIDGE RESEARCH LABS L G HANSCOM FIELD MASS
Personal Author(s) : Kearns,William J. ; Silva,Jose H.
Report Date : 19 DEC 1972
Pagination or Media Count : 24
Abstract : The fabrication of elastic surface-wave encoders and decoders for use in secure, antijam command, control, and communications systems is described. The processes consist of substrate cleaning, vacuum evaporation of thin aluminum films, photolithography, and chemical etching. Using these techniques, surface-wave interdigital transducer gratings have been fabricated with linewidths as small as 1.5 micrometer. A discussion of the factors affecting the yield of these devices is included. (Author)
Descriptors : (*TRANSDUCERS, MANUFACTURING), (*DELAY LINES, MANUFACTURING), PHOTOENGRAVING, ETCHING, LITHOGRAPHY, MICROPHOTOGRAPHY
Subject Categories : Line, Surface and Bulk Acoustic Wave Devices
Mfg & Industrial Eng & Control of Product Sys
Distribution Statement : APPROVED FOR PUBLIC RELEASE