Accession Number : AD0759257
Title : X-ray Lithography: A New High Resolution Replication Process.
Descriptive Note : Journal article,
Corporate Author : MASSACHUSETTS INST OF TECH LEXINGTON LINCOLN LAB
Personal Author(s) : Spears,David L. ; Smith,Henry I.
Report Date : 14 MAR 1972
Pagination or Media Count : 24
Abstract : A newly developed x-ray lithographic process is described and its prospects for making sub-micron resolution pattern definition a common practice are assessed. (Author)
Descriptors : (*MICROELECTRONICS, *LITHOGRAPHY), MANUFACTURING, X RAYS, TRANSDUCERS, MASKING, RESOLUTION
Subject Categories : Line, Surface and Bulk Acoustic Wave Devices
Mfg & Industrial Eng & Control of Product Sys
Distribution Statement : APPROVED FOR PUBLIC RELEASE