Accession Number : AD0759257

Title :   X-ray Lithography: A New High Resolution Replication Process.

Descriptive Note : Journal article,

Corporate Author : MASSACHUSETTS INST OF TECH LEXINGTON LINCOLN LAB

Personal Author(s) : Spears,David L. ; Smith,Henry I.

Report Date : 14 MAR 1972

Pagination or Media Count : 24

Abstract : A newly developed x-ray lithographic process is described and its prospects for making sub-micron resolution pattern definition a common practice are assessed. (Author)

Descriptors :   (*MICROELECTRONICS, *LITHOGRAPHY), MANUFACTURING, X RAYS, TRANSDUCERS, MASKING, RESOLUTION

Subject Categories : Line, Surface and Bulk Acoustic Wave Devices
      Mfg & Industrial Eng & Control of Product Sys

Distribution Statement : APPROVED FOR PUBLIC RELEASE